The Mscan can be configured for high speed color inspection of devices. Color is extremely important and necessary to detect many types of silicon defects which cannot be detected using a monochromatic camera. Passivation layers are extremely thin and changes in thickness set up interference patterns which can shift the color distribution of the reflected light without changing the total intensity. Figures 17 and 18 show defects detected by the Mscan system. Pixel sizes are adjustable down to 200 nanometers. The system supports both reflected and transmitted illumination. Transmitted illumination is used for inspection of glass panels and filters. Beltronics patented auto tracking system enables the use of high resolution optics to insure detection of extremely small defects at high scanning speeds and compensates for variations in product topology.

The Mscan can be configured with a high speed confocal imaging module, as shown in Figures 19 and 20, for production line process control and inspection of 3-D structures and metal masks. The confocal imaging module enables inspection of select layers in the structure. Figure 21 shows a two layer metal structure. Figure 22 shows a defect detected by the Mscan. The confocal optics insures that only the layer of interest is visible to the image processing electronics.
Click on link to see video of confocal system. (video file 328kb)