The Mscan detects fatal defects on organic substrates and flex circuits not visible by systems which use reflected light, as explained in the technical section. Figures 7 and 8 show a 2 micron pinhole and a fatal short detected by the Mscan System. Neither of these defects is visible by systems that use reflected light. Figure 9 shows how the Mscan sees the sidewalls of a via and a small speck of metal, not seen by reflected light systems. Such system frequently mask out parts of the via during inspection to avoid confusion and false calls. The Mscans superior detection capability overcomes these limitations enabling inspection of the entire via.
Reflected Light Image does not show pinhole Figure 7a
Mscan finds defect 2 micron pinhole Figure 7b
Reflected light image does not show short Figure 8a
Mscan finds defect Fatal short Figure 8b
Reflected light image does not show metal speck or via sidewalls Figure 9a
Mscan finds defect image shows speck and entire via including sidewalks Figure 9b
